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Electron Beam Lithgraphy

Brief description of equipment

Scanning Electron Microscope JEOL JSM-6500F equipped with an electron-beam lithography unit Raith Elphy Plus

 

 

Contact person(s)
Markus Turad, Ronny Löffler

University of Tübingen
Center for Light-Matter Interaction, Sensors & Analytics (LISA+)

Related publications

D. Bothner et al., Unusual commensurability effects in quasiperiodic pinning arrays induced by local inhomogeneities of the pinning site density, Supercond. Sci. Technol. 27, 065002 (2014).

 

 

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