Brief description of equipment
HIM “Zeiss Orion Nanofab” equipped with Neon option, two Kleindiek micromanipulators and gas injection system with three precursors for Pt, W, or SiO2 focused ion-beam-induced deposition (FIBID).
Markus Turad, Ronny Löffler
University of Tübingen
Center for Light-Matter Interaction, Sensors & Analytics (LISA+)