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Helium Ion Microscope (HIM)

Brief description of equipment

HIM “Zeiss Orion Nanofab” equipped with Neon option, two Kleindiek micromanipulators and gas injection system with three precursors for Pt, W, or SiO2 focused ion-beam-induced deposition (FIBID).


Contact person(s)

Markus Turad, Ronny Löffler

University of Tübingen
Center for Light-Matter Interaction, Sensors & Analytics (LISA+)


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