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Photolithography Unit

Brief description of equipment

Complete photolithography unit in clean-room, including mask aligner with additional UV nanoimprint option.




Contact person(s)

Markus Turad, Ronny Löffler

University of Tübingen
Center for Light-Matter Interaction, Sensors & Analytics (LISA+)

Related publications

H. Hattermann et al., Coupling ultracold atoms to a superconducting coplanar waveguide resonator, Nature Commun. 8, 2254 (2017).

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