Brief description of equipment
Complete photolithography unit in clean-room, including mask aligner with additional UV nanoimprint option.
Contact person(s)
Markus Turad, Ronny Löffler
University of Tübingen
Center for Light-Matter Interaction, Sensors & Analytics (LISA+)
Related publications
H. Hattermann et al., Coupling ultracold atoms to a superconducting coplanar waveguide resonator, Nature Commun. 8, 2254 (2017).