Brief description of equipment
Two chamber sputtering system for the deposition of oxide thin films.
One of the chambers is equipped with inverted cylindrical magnetron for the realization of YBCO films; the other is dedicated to CeO2 and MgO
Contact person(s)
Daniela Stornaiuolo
University of Naples “Federico II”, Napoli, Italy
Related publications
Resolving the effects of frequency-dependent damping and quantum phase diffusion in YBa2Cu3O7−x Josephson junctions, Physical Review B, 87, 134517 (2013)