skip to Main Content

Electron Beam Lithgraphy

Brief description of equipment

Scanning Electron Microscope JEOL JSM-6500F equipped with an electron-beam lithography unit Raith Elphy Plus



Contact person(s)
Markus Turad, Ronny Löffler

University of Tübingen
Center for Light-Matter Interaction, Sensors & Analytics (LISA+)

Related publications

D. Bothner et al., Unusual commensurability effects in quasiperiodic pinning arrays induced by local inhomogeneities of the pinning site density, Supercond. Sci. Technol. 27, 065002 (2014).



Back To Top