Dual Beam FIB “FEI Strata DB235” (Ga ion and electron beam), including two Kleindiek micromanipulators and gas injection system with precursor for Pt focused ion/electron beam induced deposition (FIBID/FEBID).
Markus Turad, Ronny Löffler
University of Tübingen
Center for Light-Matter Interaction, Sensors & Analytics (LISA+)
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